Smart MEMS for smart structures

Jeffrey N. Schoess; J. David Zook

doi:10.1117/12.210454

26 May 1995 Smart MEMS for smart structures

Jeffrey N. Schoess, J. David Zook

Proceedings Volume 2448, Smart Structures and Materials 1995: Smart Electronics; (1995) https://doi.org/10.1117/12.210454
Event: Smart Structures and Materials '95, 1995, San Diego, CA, United States

Abstract

Future advanced fixed and rotary-wing aircraft, launch vehicles, and spacecraft will incorporate smart MEMS devices to monitor structural integrity and manage overall structural health. These smart structures will be capable of assessing vehicle structural damage in real time and ultimately reconfiguring the vehicle flight control to prevent catastrophic failures. This paper describes an overview of Honeywell's MEM technology for new and aging aircraft applications to assess preflight readiness, in- flight structural integrity, and postflight time-based maintenance. Honeywell's MEMS approach combines silicon micromachining, free-space optical waveguides, high-speed optical interconnects, and supervisory sensor management to monitor structural integrity and health. A unique second-generation polysilicon resonance microbeam sensor is described. It incorporates a micron-level vacuum-encapsulated microbeam to optically sense structural-integrity parameters such as acoustic- mission, strain, and to optically power the sensor pickoff. Its principle of operation and significant payoffs and benefits are summarized.

Citation Download Citation

Jeffrey N. Schoess and J. David Zook "Smart MEMS for smart structures", Proc. SPIE 2448, Smart Structures and Materials 1995: Smart Electronics, (26 May 1995); https://doi.org/10.1117/12.210454

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