Paper
25 September 1995 New design for a field emission electron gun immersed in a magnetic lens field
Kenichi Saito, Hirofumi Morita, Nobuo Shimazu, Yasumichi Uno
Author Affiliations +
Abstract
This paper describes a new design for a field emission electron gun immersed in a magnetic- lens field. Its low aberration yields both a high brightness and a high emittance. A single-pole- like magnetic lens made a water-cooled pipe coil produces a magnetic flux density of 0.28 T at the emitter tip. The spherical aberration of the gun, as calculated by an electron ray tracing program, is only 1/3 that of a conventional gun with a magnetic lens. A prototype of the gun was constructed using a zirconium-oxide/tungsten thermal-field emitter. The measured crossover diameters agree with those calculated by the ray tracing program, confirming that the aberration is very low.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kenichi Saito, Hirofumi Morita, Nobuo Shimazu, and Yasumichi Uno "New design for a field emission electron gun immersed in a magnetic lens field", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); https://doi.org/10.1117/12.221572
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CITATIONS
Cited by 1 scholarly publication.
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KEYWORDS
Magnetism

Ray tracing

Monochromatic aberrations

Electrodes

Chromatic aberrations

Optical properties

Prototyping

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