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The aim of our project is to control the position in 3D-space of a micro robot with sub micron accuracy and manipulate Microsystems aided by a real time 3D computer graphics (virtual reality). As Microsystems and micro structures become smaller, it is necessary to build a micro robot ((mu) -robot) capable of manipulating these systems and structures with a precision of 1 micrometers or even higher. These movements have to be controlled and guided. The first part of our project was to develop a real time 3D computer graphics (virtual reality) environment man-machine interface to guide the newly developed robot similar to the environment we built in a macroscopic robotics. Secondly we want to evaluate measurement techniques to verify its position in the region of interest (workspace). A new type of microrobot has been developed for our purposed. Its simple and compact design is believed to be of promise in the microrobotics field. Stepping motion allows speed up to 4 mm/s. Resolution smaller than 10 nm is achievable. We also focus on the vision system and on the virtual reality interface of the complex system. Basically the user interacts with the virtual 3D microscope and sees the (mu) -robot as if he is looking through a real microscope. He is able to simulate the assembly of the missing parts, e.g. parts of the micrometer, beforehand in order to verify the assembly manipulation steps such assembly of the missing parts, e.g. parts of a micromotor, beforehand in order to verify the assembly manipulation steps such as measuring, moving the table to the right position or performing the manipulation. Micro manipulation is form of a teleoperation is then performed by the robot-unit and the position is controlled by vision. First results have shown, that a guided manipulations with submicronics absolute accuracy can be achieved. Key idea of this approach is to use the intuitiveness of immersed vision to perform robotics tasks in an environment where human has only access using high performing measurement and visualization systems. Using also the virtual scene exactly reconstructed from the CAD-CAM-databases of the real environment being considered as the a priori knowledge, human observations and computer-vision based techniques the robustness and speed of such a simulation can be improved tremendously.
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