Three-electrode excimer laser with an intermediate control electrode

Valeriy V. Borovkov; V. V. Voronin; Sergey L. Voronov; Boris V. Lazhintsev; Vladimir A. Nor-Arevyan; V. A. Tananakin; Gennadiy I. Feodorov

doi:10.1117/12.216926

23 August 1995 Three-electrode excimer laser with an intermediate control electrode

Valeriy V. Borovkov, V. V. Voronin, Sergey L. Voronov, Boris V. Lazhintsev, Vladimir A. Nor-Arevyan, V. A. Tananakin, Gennadiy I. Feodorov

Author Affiliations +

Proceedings Volume 2619, International Conference on Atomic and Molecular Pulsed Laser; (1995) https://doi.org/10.1117/12.216926
Event: Second Conference on Pulsed Lasers: Pulsed Atomic and Molecular Transitions, 1995, Tomsk, Russian Federation

Abstract

There took place the design and development of a three-electrode discharge laser with a gas breakdown occurring at a high-voltage pulse delivery to the intermediate electrode which is a control one and when the capacitor of the main discharge is immediately connected with two other electrodes. While investigating XeCl, KrCl excimer lasers, we got to know that this method of the active medium excitation allows to decrease the loads on the switches of the power supply system several tens of times.

Citation Download Citation

Valeriy V. Borovkov, V. V. Voronin, Sergey L. Voronov, Boris V. Lazhintsev, Vladimir A. Nor-Arevyan, V. A. Tananakin, and Gennadiy I. Feodorov "Three-electrode excimer laser with an intermediate control electrode", Proc. SPIE 2619, International Conference on Atomic and Molecular Pulsed Laser, (23 August 1995); https://doi.org/10.1117/12.216926

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