Paper
26 June 1996 Monolithic integration of InGaAs/InP JFET/detectors for NIR imaging applications
Michael J. Lange, Dong-Su Kim, Stephen R. Forest, Walter F. Kosonocky, Nicholas A. Doudoumopoulos, Marshall J. Cohen, Gregory H. Olsen
Author Affiliations +
Abstract
Monolithic arrays of InP JFET switches and InGaAs detectors have been demonstrated with unprecedented JFET leakages below 20 pA. Improvements in the JFET dark current resulted from reduced device geometry along with the use of a novel reversed bias p-n junction. Successful devices have been made both with OMVPE and gas source MBE crystal. Other impressive results with column-switched 16 X 16 element arrays include detector leakages below 1 nA, 70 percent quantum efficiency from 1.0 - 1.65 micrometers and ON/OFF ratios beyond 70 db.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael J. Lange, Dong-Su Kim, Stephen R. Forest, Walter F. Kosonocky, Nicholas A. Doudoumopoulos, Marshall J. Cohen, and Gregory H. Olsen "Monolithic integration of InGaAs/InP JFET/detectors for NIR imaging applications", Proc. SPIE 2745, Infrared Readout Electronics III, (26 June 1996); https://doi.org/10.1117/12.243540
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KEYWORDS
Field effect transistors

Sensors

Indium gallium arsenide

Staring arrays

Etching

Semiconducting wafers

Switching

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