New integrated optics displacement sensor in glass

Thiemo Lang; Denis Genon-Catalot; Pascal Dandrea; Isabelle Schanen Duport; Pierre Benech

doi:10.1117/12.248503

26 August 1996 New integrated optics displacement sensor in glass

Thiemo Lang, Denis Genon-Catalot, Pascal Dandrea, Isabelle Schanen Duport, Pierre Benech

Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996) https://doi.org/10.1117/12.248503
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

In this paper we present an integrated optics displacement sensor with an interference head, where one-dimensional fringe pattern is created, allowing multiphase detection. Waveguides placed in the interference pattern are sampling four ideally pi/2 phase shifted signals. The four phase detection allows us to overcome the difficulties of intensity and contrast variation by suitable electronic treatment and offers potentially very high resolution displacement measurements. The interference fringe spacing and therefore equal phase shifts between the signals is controlled by the geometrical parameters of the mask design and therefore insensitive to fabrication tolerances.

Citation Download Citation

Thiemo Lang, Denis Genon-Catalot, Pascal Dandrea, Isabelle Schanen Duport, and Pierre Benech "New integrated optics displacement sensor in glass", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); https://doi.org/10.1117/12.248503

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available