Image matching for the extension of the AFM measuring range

Wei Wu; Jiabi Chen; Zhongcheng Liang

doi:10.1117/12.263124

31 December 1996 Image matching for the extension of the AFM measuring range

Wei Wu, Jiabi Chen, Zhongcheng Liang

Proceedings Volume 2866, International Conference on Holography and Optical Information Processing (ICHOIP '96); (1996) https://doi.org/10.1117/12.263124
Event: International Conference on Holography and Optical Information Processing, 1996, Nanjing, China

Abstract

This paper presents a method based on the image matching to extend the measuring range of AFM. By this way, we can extend the measuring range of AFM without changing the hardware structure of AFM system. It is proved that this method is powerful to resist the noise and the images can be matched precisely and quickly. In principle, the measuring range of AFM can be extended unlimitedly.

Citation Download Citation

Wei Wu, Jiabi Chen, and Zhongcheng Liang "Image matching for the extension of the AFM measuring range", Proc. SPIE 2866, International Conference on Holography and Optical Information Processing (ICHOIP '96), (31 December 1996); https://doi.org/10.1117/12.263124

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