Elastic characterization of supported films by Brillouin light scattering

Fabrizio Nizzoli; Loris Giovannini

doi:10.1117/12.248671

23 August 1996 Elastic characterization of supported films by Brillouin light scattering

Fabrizio Nizzoli, Loris Giovannini

Proceedings Volume 2868, Second International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (1996) https://doi.org/10.1117/12.248671
Event: Second International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 1996, Ancona, Italy

Abstract

Bulk and surface sound waves in thermal equilibrium in solids scatter light inelastically (Brillouin scattering). From the frequency shift of the scattered light it is possible to measure the sound velocities of bulk and surface waves propagating along selected propagation directions. Then the elastic moduli can be extracted from the sound velocities. The scattered light is frequency analyzed using a Fabry-Perot interferometer, with typical frequency shifts in the range 5 - 100 GHz. The technique is non-destructive and is particularly useful for the elastic characterization of supported films and composite materials, like multilayers. Applications are shown for metallic multilayer films, polymeric films, silicon on insulator bilayers.

Citation Download Citation

Fabrizio Nizzoli and Loris Giovannini "Elastic characterization of supported films by Brillouin light scattering", Proc. SPIE 2868, Second International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (23 August 1996); https://doi.org/10.1117/12.248671

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