Principle of AOM laser heterodyne measuring and its instrument

Fengzhou Fang; Yiqun Zhang; Dingwen Zhou; Guoxiong Zhang

doi:10.1117/12.253094

3 October 1996 Principle of AOM laser heterodyne measuring and its instrument

Fengzhou Fang, Yiqun Zhang, Dingwen Zhou, Guoxiong Zhang

Author Affiliations +

Proceedings Volume 2899, Automated Optical Inspection for Industry; (1996) https://doi.org/10.1117/12.253094
Event: Photonics China '96, 1996, Beijing, China

Abstract

Laser measuring is one of the main methods in precision measuring. Two-frequency laser measuring using Zeeman effect is a usual measuring method, which has better anti-jamming characteristic and higher measuring accuracy. But because of higher cost and lower motion velocity of the measured workpiece, its application is restricted. Acousto-optical modulated laser heterodyne measuring which has many advantages is researched and discussed in theory in this paper. And the realization of the measuring instrument is studied carefully. The method shows a new way for measuring the displacement with lower cost and higher accuracy.

Citation Download Citation

Fengzhou Fang, Yiqun Zhang, Dingwen Zhou, and Guoxiong Zhang "Principle of AOM laser heterodyne measuring and its instrument", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); https://doi.org/10.1117/12.253094

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