Microfabricated interlock system for precision alignment

Roya Sabeti; Mark R. Holl; Eric H. Altendorf; Paul Yager

doi:10.1117/12.269975

31 March 1997 Microfabricated interlock system for precision alignment

Roya Sabeti, Mark R. Holl, Eric H. Altendorf, Paul Yager

Proceedings Volume 2978, Micro- and Nanofabricated Electro-Optical Mechanical Systems for Biomedical and Environmental Applications; (1997) https://doi.org/10.1117/12.269975
Event: BiOS '97, Part of Photonics West, 1997, San Jose, CA, United States

Abstract

A mechanical interlock system is reported that achieves the manual alignment of two components accurate to within plus or minus 10 micrometers in three spatial coordinates. In addition, the system allows rapid component interchange. The system is based on a novel two stage application of the principles of the kinematic location of instrument components. A macro scale kinematic mount allows manual handling while a micro scale mount delivers the accuracy required. Silicon microfabrication methods are used to create features in the micron size range accurately and repeatable for the micro scale mount. Such a system could be used for fluidic, pneumatic, electrical, optical, or mechanical interconnects. We use it for the alignment of optics to flow channel in an optical flow cytometer which is part of a microfluidic total chemical analysis system we are developing.

Citation Download Citation

Roya Sabeti, Mark R. Holl, Eric H. Altendorf, and Paul Yager "Microfabricated interlock system for precision alignment", Proc. SPIE 2978, Micro- and Nanofabricated Electro-Optical Mechanical Systems for Biomedical and Environmental Applications, (31 March 1997); https://doi.org/10.1117/12.269975

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