Wide-spectral response photodetectors based on microcrystalline hydrogenated silicon thin films

Manuela Vieira; Alessandro Fantoni; Svetoslav Koynov; Reinhard Schwarz

doi:10.1117/12.271189

15 April 1997 Wide-spectral response photodetectors based on microcrystalline hydrogenated silicon thin films

Manuela Vieira, Alessandro Fantoni, Svetoslav Koynov, Reinhard Schwarz

Author Affiliations +

Proceedings Volume 2999, Photodetectors: Materials and Devices II; (1997) https://doi.org/10.1117/12.271189
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Microcrystalline hydrogenated silicon based p-i-n photodiodes with an increased infrared sensitivity have been deposited by a new cyclic CVD method. The microcrystalline deice, when compared to the amorphous counterpart, presents an increased collection efficiency, dependent on bias voltage, in the red and near-infrared spectral region. The shape of the spectral response also depends on the details of the quality of the individual layers, like conductivity and thickness of the p-type contact layer. AS model for the electronic transport of (mu) c-Si:H p-i-n photodetectors is presented and supported by numerical simulation.

Citation Download Citation

Manuela Vieira, Alessandro Fantoni, Svetoslav Koynov, and Reinhard Schwarz "Wide-spectral response photodetectors based on microcrystalline hydrogenated silicon thin films", Proc. SPIE 2999, Photodetectors: Materials and Devices II, (15 April 1997); https://doi.org/10.1117/12.271189

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