Computationally efficient ion implantation damage model: modified Kinchin-Pease model

Geng Wang; Shiyang Tian; Michael F. Morris; Steven J. Morris; Borna J. Obradovic; Ganesh Balamurugan; Al F. Tasch Jr.

doi:10.1117/12.284607

27 August 1997 Computationally efficient ion implantation damage model: modified Kinchin-Pease model

Geng Wang, Shiyang Tian, Michael F. Morris, Steven J. Morris, Borna J. Obradovic, Ganesh Balamurugan, Al F. Tasch Jr.

Proceedings Volume 3212, Microelectronic Device Technology; (1997) https://doi.org/10.1117/12.284607
Event: Microelectronic Manufacturing, 1997, Austin, TX, United States

Abstract

A new computationally efficient ion implantation damage model has been developed and implemented in UT-MARLOWE Version 4.0. Based on the modified Kinchin-Pease formula, this model accounts for damage generation, damage accumulation, defect encounters and amorphization. With two parameters, one species-independent and the other species-dependent, good agreement with experimental impurity profiles has been obtained for sufficiently low energy implants. In addition, the amorphous layer thicknesses obtained in this model are also in reasonable agreement with experimental measurements. For higher energy implants, another parameter is introduced into the model to remedy a deficiency of the conventional Kinchin-Pease model. With this modification, good agreement with experimentally measured impurity profiles has been obtained for implant energies up to 65 keV for BF₂, 80 keV for boron, 180 keV for arsenic and phosphorus over a wide range of doses (1 X 10¹³ cm^-2 to 8 X 10¹⁵ cm^-2) and tilt angles and rotation angles. In combination with other CPU time reduction techniques, a speed improvement of up to an order of magnitude has been observed.

Citation Download Citation

Geng Wang, Shiyang Tian, Michael F. Morris, Steven J. Morris, Borna J. Obradovic, Ganesh Balamurugan, and Al F. Tasch Jr. "Computationally efficient ion implantation damage model: modified Kinchin-Pease model", Proc. SPIE 3212, Microelectronic Device Technology, (27 August 1997); https://doi.org/10.1117/12.284607

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