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5 September 1997 Laser-micromachined microchannel solvent separator
Dean W. Matson, Peter M. Martin, Wendy D. Bennett, Donald C. Stewart, John W. Johnston
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Proceedings Volume 3223, Micromachining and Microfabrication Process Technology III; (1997) https://doi.org/10.1117/12.284495
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States
Abstract
The fabrication of components for a microchannel chemical solvent separation unit is described. The performance of this unit is intended to employ enhanced kinetic effects due to short contact times encountered in to facilitate extraction of one dissolved species from one solvent into another. Components for the device are fabricated by laser micromachining, photochemical machining, and photolithographic patterning. The separation unit consists of a series of parallel flow and counterflow microchannels separated by micromachined membranes and assembled into a single unit by a lamination process. In a sample design, channel width, membrane width and length are 100 micrometer, 1 cm, and 8 cm respectively. Test membranes were fabricated from stainless steel using photochemical machining and from polyimide by using two distinct laser micromachining processes. Use of the lamination fabrication method allows flexibility in the design of the microchannels within the unit. Preliminary results of membrane tests and a brief discussion of future efforts are included.
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Dean W. Matson, Peter M. Martin, Wendy D. Bennett, Donald C. Stewart, and John W. Johnston "Laser-micromachined microchannel solvent separator", Proc. SPIE 3223, Micromachining and Microfabrication Process Technology III, (5 September 1997); https://doi.org/10.1117/12.284495
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KEYWORDS
Micromachining
Laser processing
Optical lithography
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