SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)

Brady R. Davies; Carole Craig Barron; Jeffry J. Sniegowski; M. Steven Rodgers

doi:10.1117/12.284568

2 September 1997 SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)

Brady R. Davies, Carole Craig Barron, Jeffry J. Sniegowski, M. Steven Rodgers

Proceedings Volume 3226, Microelectronic Structures and MEMS for Optical Processing III; (1997) https://doi.org/10.1117/12.284568
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

The SAMPLE (Sandia agile MEMS prototyping, layout tools, and education) service makes Sandia's state-of-the-art surface micromachining fabrication process, known as SUMMiT, available to U.S. industry for the first time. The service provides a short course and customized computer-aided design (CAD) tools to assist customers in designing micromachine prototypes to be fabricated in SUMMiT. Frequent small-scale manufacturing runs then provide SAMPLE designers with hundreds of sophisticated MEMS (microelectromechanical systems) chips. SUMMiT (Sandia ultra-planar, multi-level MEMS technology) offers unique surface-micromachining capabilities, including four levels of polycrystalline silicon (including the ground layer), flanged hubs, substrate contacts, one-micron design rules, and chemical-mechanical polishing (CMP) planarization. This paper describes the SUMMiT process, design tools, and other information relevant to the SAMPLE service and SUMMiT process.

Citation Download Citation

Brady R. Davies, Carole Craig Barron, Jeffry J. Sniegowski, and M. Steven Rodgers "SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)", Proc. SPIE 3226, Microelectronic Structures and MEMS for Optical Processing III, (2 September 1997); https://doi.org/10.1117/12.284568

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available