Production Techniques For High Volume Sputtered Films

Albany D. Grubb; Thomas S. Mosakowski; Walter G. Overacker

doi:10.1117/12.933289

29 April 1982 Production Techniques For High Volume Sputtered Films

Albany D. Grubb, Thomas S. Mosakowski, Walter G. Overacker

Proceedings Volume 0325, Optical Thin Films; (1982) https://doi.org/10.1117/12.933289
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States

Abstract

Production techniques have been developed and proven in a production facility owned and operated by Airco Temescal in Carleton, Michigan. This plant deposits single-and multilayer films by sputtering on glass for architectural applications. Other plants have been built for handling glass substrates up to 100 inches wide to 144 inches long with average line speeds up to 12 feet per minute. This proven technology is applicable to the manufacture of other products, such as mirrors and glass with conductive coatings in large quantitites.

Citation Download Citation

Albany D. Grubb, Thomas S. Mosakowski, and Walter G. Overacker "Production Techniques For High Volume Sputtered Films", Proc. SPIE 0325, Optical Thin Films, (29 April 1982); https://doi.org/10.1117/12.933289

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