Nonlinear photon-stimulated desorption from an oxidized tungsten surface

David P. Taylor; Henry Helvajian

doi:10.1117/12.309519

3 June 1998 Nonlinear photon-stimulated desorption from an oxidized tungsten surface

David P. Taylor, Henry Helvajian

Author Affiliations +

Proceedings Volume 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III; (1998) https://doi.org/10.1117/12.309519
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

The results of a study of the laser Photon Stimulated Desorption (PSD) from an oxidized tungsten surface using 248 nm light are reported. The tungsten oxide system was chosen as a prototype for stimulated desorption resulting from the laser interaction with an oxide covered metal surface. The desorption yield, laser fluence dependence, and behavior of tungsten, tungsten oxide and other desorbed cations (including alkali atoms) have been used to probe aspects of the energetics under different conditions of oxygen dosage and laser exposure history. It is interesting to compare the nonlinear laser PSD results with the Electron Stimulated Desorption results which have appeared in the literature.

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David P. Taylor and Henry Helvajian "Nonlinear photon-stimulated desorption from an oxidized tungsten surface", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); https://doi.org/10.1117/12.309519

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