Adaptive interferometer measurement of the piezoelectric and electro-optic coefficients of the spin-coated PZT thin films

Vasilii V. Spirin; Changho Lee; Kwangsoo No; Igor A. Sokolov

doi:10.1117/12.316958

21 July 1998 Adaptive interferometer measurement of the piezoelectric and electro-optic coefficients of the spin-coated PZT thin films

Vasilii V. Spirin, Changho Lee, Kwangsoo No, Igor A. Sokolov

Author Affiliations +

Proceedings Volume 3330, Smart Structures and Materials 1998: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials; (1998) https://doi.org/10.1117/12.316958
Event: 5th Annual International Symposium on Smart Structures and Materials, 1998, San Diego, CA, United States

Abstract

A novel interferometric modulation technique for optical thin film testing using GaAs:Cr adaptive photodetectors based on the effect of the non-steady-state photoelectromotive force is presented. The technique needs no special vibroinsulation and automatically adjusts and keeps the operation point of the interferometer. Two different interferometric setups with GaAs:Cr adaptive photodetectors are reported. A modified Mach-Zehnder interferometer with adaptive photodetector is used to study piezoelectric coefficient, d$_33) of the thin film and the influence of the bending motion of the substrate. A two beams polarization interferometer with adaptive photodetector is developed for effective differential Pockels coefficient, r_c equals r₃₃-(n₀/ne)$=3)r₁₃, measurement. It is shown that the proposed two beams polarization technique allows measurement of the Pockels coefficient of thin films with a strong Fabry-Perot effect usually present in ferroelectric thin film. Strong hysteresis effect with a slightly asymmetric form of the hysteresis loop was observed at the dependence of the d₃₃ and r_e coefficients of the PZT thin film from the DC electric field. The values of d₃₃ and R_e are in agreement with known data.

Citation Download Citation

Vasilii V. Spirin, Changho Lee, Kwangsoo No, and Igor A. Sokolov "Adaptive interferometer measurement of the piezoelectric and electro-optic coefficients of the spin-coated PZT thin films", Proc. SPIE 3330, Smart Structures and Materials 1998: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials, (21 July 1998); https://doi.org/10.1117/12.316958

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