Detection of CD error caused by multipass writing method

Andrew Wang

doi:10.1117/12.328831

1 September 1998 Detection of CD error caused by multipass writing method

Andrew Wang

Proceedings Volume 3412, Photomask and X-Ray Mask Technology V; (1998) https://doi.org/10.1117/12.328831
Event: Photomask Japan '98 Symposium on Photomask and X-Ray Mask Technology V, 1998, Kawasaki City, Japan

Abstract

As the IC design rule is getting smaller, mask writer's accuracy plays a more important role in mask making. In order to reduce writer's butting error, high end writers all use multi-pass writing technique. Theoretically, the more passes are used, the smaller butting error is expected. When writer with multi-pass technique has encountered abnormal sectors in the pattern loading system, extra or missing bits might cause CD variation on the paste. We found high end masks with CD variation smaller than 0.15 micrometers written by an eight pass writing system. It is very important to be able to detect this kind of CD error before the mask is shipped. In this paper, we will discuss TMC's approach to the detection of CD error caused by the writer.

Citation Download Citation

Andrew Wang "Detection of CD error caused by multipass writing method", Proc. SPIE 3412, Photomask and X-Ray Mask Technology V, (1 September 1998); https://doi.org/10.1117/12.328831

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available