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We have developed several types of mechanical and electro- mechanical acoustic sensors using SOI (silicon on insulator) micromachining technique. This paper describes the design, the fabrication and the characterization of three such acoustic sensors. The goal of our research is to integrate a preprocessor for a voice/speech recognition system on a silicon chip, and to create an implantable hearing aid device.
Markus Mueller,Hiroshi Toshiyoshi, andHiroyuki Fujita
"Acoustic wavelet analysis using micro-electro-mechanical sensors", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323905
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Markus Mueller, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Acoustic wavelet analysis using micro-electro-mechanical sensors," Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323905