System for measurement of CCD parameters

Rihong Zhu; Daocai Xiang; Zhixing Yang; Jinbang Chen

doi:10.1117/12.318089

11 August 1998 System for measurement of CCD parameters

Rihong Zhu, Daocai Xiang, Zhixing Yang, Jinbang Chen

Proceedings Volume 3553, Detectors, Focal Plane Arrays, and Imaging Devices II; (1998) https://doi.org/10.1117/12.318089
Event: Photonics China '98, 1998, Beijing, China

Abstract

This paper presents a system for measurement of CCD parameters that combines a photo-injection system and auto- focus systems. In the photo-injection system, a reverse microscope with plano-achromatic objective is used to produce a small light spot of (Phi) 2 micrometers . In the auto- focus system, astigmatic auto-focus method is applied. The auto-focus signal is detected by a simulation quadrate simulated by CCD. A piezoelectric transducer with high sensitivity and resolution is used to drive the focusing objective for a real-time control of the position of the small light spot which was required to be injected into one of pixels of CCD measured.

Citation Download Citation

Rihong Zhu, Daocai Xiang, Zhixing Yang, and Jinbang Chen "System for measurement of CCD parameters", Proc. SPIE 3553, Detectors, Focal Plane Arrays, and Imaging Devices II, (11 August 1998); https://doi.org/10.1117/12.318089

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