LIGA-like process for high-aspect-ratio PZT microstructures

Gil S. Lee; Yoonyoung Jin; Sangwon Park; Pratul K. Ajmera; Chantal G. Khan Malek; Jin T. Wang; F. Tang

doi:10.1117/12.354296

20 July 1999 LIGA-like process for high-aspect-ratio PZT microstructures

Gil S. Lee, Yoonyoung Jin, Sangwon Park, Pratul K. Ajmera, Chantal G. Khan Malek, Jin T. Wang, F. Tang

Proceedings Volume 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS; (1999) https://doi.org/10.1117/12.354296
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

Processing technique for fabrication of high-aspect ratio structures in PZT is developed in this work using deep X-ray exposures at the CAMD synchrotron storage ring. Arrays of posts were successfully fabricated in PMMA mold as thick as 2700 micrometers and with aspect ratio as high as 15. This LIGA- like technique allows fabrication of structures of shapes and sizes not possible with standard techniques using bulk PZT material or by the existing thin film techniques for PZT deposition. The process shows promise for various applications including high resolution medical imaging and optical projection.

Citation Download Citation

Gil S. Lee, Yoonyoung Jin, Sangwon Park, Pratul K. Ajmera, Chantal G. Khan Malek, Jin T. Wang, and F. Tang "LIGA-like process for high-aspect-ratio PZT microstructures", Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); https://doi.org/10.1117/12.354296

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