Fabrication of a smart monolithic 2D quartz microscanner

Moussa Hoummady; L. Majewski; V. Robert; C. Bonjour; B. Chahboune

doi:10.1117/12.341203

10 March 1999 Fabrication of a smart monolithic 2D quartz microscanner

Moussa Hoummady, L. Majewski, V. Robert, C. Bonjour, B. Chahboune

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341203
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

The concept and the operation of micromachined monolithic 2D Microscanner are reported. Quartz material is used for its bulk micromachining capability as well as for its piezoelectric properties. Due to direct and reverse piezoelectric effect, the used design allowed to integrate both actuators and displacement sensor. A finite element calculation was performed to predict the operation principle of the microscanner. It consists of a movable table supported by four meander-line springs. On each spring metallic electrodes are deposited to induce strain allowing to move the table. The displacement measurement can be performed by electrical charges measurement on opposite spring. Preliminary results show the static and dynamic displacement capability. In static mode, a displacement of few microns can be obtained under a 150 V DC driving voltage. At resonance frequency, the vibration amplitude can reach 150 micrometers in X direction and 50 micrometers in Y direction. In comparison to conventional tube scanners, the advantages of micromachined monolithic microscanner, are low cost fabrication, large displacement range and close loop capability.

Citation Download Citation

Moussa Hoummady, L. Majewski, V. Robert, C. Bonjour, and B. Chahboune "Fabrication of a smart monolithic 2D quartz microscanner", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341203

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