Paper
22 March 1999 Neural-based production yield prediction: an RBF-based approach
Kurosh Madani, Ghislain de Tremiolles, Erin Williams, Pascal Tannhof
Author Affiliations +
Abstract
Prediction and modeling in the case of non linear systems (or processes), especially of complex industrial processes are known being a class of involved problems. In this paper, we deal with the production yield prediction dilemma in VLSI manufacturing. An RBF neural networks based approach and its hardware implementation on a ZISC neural board have been presented. Experimental results comparing our approach with an expert have been reported and discussed.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kurosh Madani, Ghislain de Tremiolles, Erin Williams, and Pascal Tannhof "Neural-based production yield prediction: an RBF-based approach", Proc. SPIE 3722, Applications and Science of Computational Intelligence II, (22 March 1999); https://doi.org/10.1117/12.342904
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Neural networks

Prototyping

Manufacturing

Data processing

Semiconducting wafers

Modeling

Very large scale integration

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