Novel film sensor based on p-polarized reflectance

Zhengtian Gu; Peihui Liang; Xiaolin Liu; Weiqing Zhang

doi:10.1117/12.347765

7 May 1999 Novel film sensor based on p-polarized reflectance

Zhengtian Gu, Peihui Liang, Xiaolin Liu, Weiqing Zhang

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347765
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

A new scheme of sensor is presented in this paper. The optimization of parameters of the sensor is carried out for designing optical sensor with high sensitivity. By data simulation, the resolutions of n_f, k_f and d_f of the film sensor are predicted to be less than 10^-7, 10^-5, 10^-3 nm, respectively. The optical parameters of sol-gel SnO₂ film were measured under different dip rates and annealing temperatures, and the sensitivity to the gas C₃H₈ was investigated. The results indicate that the detection limit is available to 10^-1 ppm on the condition of optimum optical parameter and incident angle.

Citation Download Citation

Zhengtian Gu, Peihui Liang, Xiaolin Liu, and Weiqing Zhang "Novel film sensor based on p-polarized reflectance", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347765

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