Optical characterization of multilayer systems with randomly rough boundaries

Ivan Ohlidal; Frantisek Vizd'a; Miloslav Ohlidal

doi:10.1117/12.355053

19 July 1999 Optical characterization of multilayer systems with randomly rough boundaries

Ivan Ohlidal, Frantisek Vizd'a, Miloslav Ohlidal

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.355053
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

In this contribution examples of the optical characterization of multilayer systems with randomly rough boundaries are presented. The method based on measuring and interpreting the spectral dependences of the coherent reflectance is used to determine the values of the optical and statistical parameters of samples of three-layer and thirteen-layer systems exhibiting the rough boundaries. The systems mentioned are formed by thin films of SiO₂ and TiO₂.

Citation Download Citation

Ivan Ohlidal, Frantisek Vizd'a, and Miloslav Ohlidal "Optical characterization of multilayer systems with randomly rough boundaries", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.355053

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