Calibration facility in the XUV region for reflective optics

Andrea Marco Malvezzi; Gianluca Secondi

doi:10.1117/12.371093

25 November 1999 Calibration facility in the XUV region for reflective optics

Andrea Marco Malvezzi, Gianluca Secondi

Author Affiliations +

Proceedings Volume 3764, Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III; (1999) https://doi.org/10.1117/12.371093
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

A calibration facility of laboratory size and modular in design is described for absolute spectral reflectivity and spatial resolution in image-forming devices. It is based on an optical table concept where all optical elements can be modularly positioned on remotely controlled translation/rotation stages. XUV photons are provided by a minifocus conventional source with replaceable anode. K-, L-, and M- band transition radiation from different metals is used. This source can be positioned at variable distances (up to 5 m) from the measurement chamber for imaging purposes. Spectral control of the radiation used in the tests can be achieved with transmission filters, with grazing incidence reflections or with a grazing incidence monochromator. Channeltron detectors in photon counting mode monitor incident and reflected signals. This instrument is now being used for characterizing grazing incidence flat mirrors as well as multilayer-coated optical surfaces.

Citation Download Citation

Andrea Marco Malvezzi and Gianluca Secondi "Calibration facility in the XUV region for reflective optics", Proc. SPIE 3764, Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, (25 November 1999); https://doi.org/10.1117/12.371093

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