Electron emission from a glass surface subjected to an intensive electron beam

Anatoly M. Filachev; Boris I. Fouks; Dmitrii E. Greenfield

doi:10.1117/12.350905

10 June 1999 Electron emission from a glass surface subjected to an intensive electron beam

Anatoly M. Filachev, Boris I. Fouks, Dmitrii E. Greenfield

Proceedings Volume 3819, International Conference on Photoelectronics and Night Vision Devices; (1999) https://doi.org/10.1117/12.350905
Event: International Conference on Photoelectronics and Night Vision Devices, 1998, Moscow, Russian Federation

Abstract

Electron-beam processing of insulating materials faces some difficulties connected with electric charge accumulation during electron irradiation. In this paper investigation of charging dynamics of glasses subjected to electron beam, is presented. It was found that secondary emission from the surface is not the only way of excess charge vanishing in some insulating materials. Under certain circumstances, strong electric field of introduced charge may result in intensive hot electron emission from the surface. This emission, in turn, leads to this charge rapid disappearing. This mechanism prevents such insulators from charging under the electron beam irradiation and facilitates processing them significantly. Main features of emission of this kind are discussed.

Citation Download Citation

Anatoly M. Filachev, Boris I. Fouks, and Dmitrii E. Greenfield "Electron emission from a glass surface subjected to an intensive electron beam", Proc. SPIE 3819, International Conference on Photoelectronics and Night Vision Devices, (10 June 1999); https://doi.org/10.1117/12.350905

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