Compensation method for the scale linearization of the high-precision laser interferometer

Ondrej Cip; Frantisek Petru

doi:10.1117/12.353052

14 July 1999 Compensation method for the scale linearization of the high-precision laser interferometer

Ondrej Cip, Frantisek Petru

Proceedings Volume 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; (1999) https://doi.org/10.1117/12.353052
Event: Eleventh Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 1998, Stara Lesna, Slovakia

Abstract

In the paper, the authors discuss an increase of the precision of a laser interferometer for measurement in the subnanometer range, for example, for refractometry and ultra-high precision measurements. There are two methods of the detection of interferometer fringes. One type applies the heterodyne principle with the frequency subtracting and the two-frequency laser. The other type is based on the amplitude division of the fringe and on the single-frequency laser. The paper deal with the latter type of the interferometer.

Citation Download Citation

Ondrej Cip and Frantisek Petru "Compensation method for the scale linearization of the high-precision laser interferometer", Proc. SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, (14 July 1999); https://doi.org/10.1117/12.353052

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