Laser Applications To Semiconductor Device Processing

Rajiv R. Shah

doi:10.1117/12.934940

9 August 1983 Laser Applications To Semiconductor Device Processing

Rajiv R. Shah

Proceedings Volume 0385, Laser Processing of Semiconductor Devices; (1983) https://doi.org/10.1117/12.934940
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States

Abstract

Laser applications to the thermal processing of integrated circuits may be divided into two broad categories: one, applications to the improvement of existing process steps and, two, applications to processes that will allow fabrication of novel device structures. This paper will briefly review these applications, discuss potential problems in the use of lasers for device processing and possible solutions to these problems.

Citation Download Citation

Rajiv R. Shah "Laser Applications To Semiconductor Device Processing", Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); https://doi.org/10.1117/12.934940

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