Paper
9 August 1983 Laser Applications To Semiconductor Device Processing
Rajiv R. Shah
Author Affiliations +
Proceedings Volume 0385, Laser Processing of Semiconductor Devices; (1983) https://doi.org/10.1117/12.934940
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States
Abstract
Laser applications to the thermal processing of integrated circuits may be divided into two broad categories: one, applications to the improvement of existing process steps and, two, applications to processes that will allow fabrication of novel device structures. This paper will briefly review these applications, discuss potential problems in the use of lasers for device processing and possible solutions to these problems.
© (1983) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rajiv R. Shah "Laser Applications To Semiconductor Device Processing", Proc. SPIE 0385, Laser Processing of Semiconductor Devices, (9 August 1983); https://doi.org/10.1117/12.934940
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KEYWORDS
Laser processing

Semiconductor lasers

Oxides

Silicon

Laser applications

Metals

Resistors

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