Micromechanical structure development for chemical analysis: study of porous silicon as an adsorbent

Silvana Gasparotto de Souza; Elisabete Galeazzo; Maria Lucia Pereira da Silva; Rogerio Furlan; Francisco Javier Ramirez Fernandez

doi:10.1117/12.364467

29 September 1999 Micromechanical structure development for chemical analysis: study of porous silicon as an adsorbent

Silvana Gasparotto de Souza, Elisabete Galeazzo, Maria Lucia Pereira da Silva, Rogerio Furlan, Francisco Javier Ramirez Fernandez

Author Affiliations +

Proceedings Volume 3891, Electronics and Structures for MEMS; (1999) https://doi.org/10.1117/12.364467
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

The aim of this work is to investigate the use of microchannels to concentrate pollutants present in the air. Devices with a length of 30 cm, a width of 100 micrometers and a depth of 30 micrometers , sealed by anodically bonded glass, were manufactured. Tests of adsorption characteristics were made using n-hexane. To reliably insert N₂ contaminated with 1000 ppm of n-hexane in the microstructure, a simple setup was manufactured. This setup allows to insert the reactant, remove the amount of reactant adsorbed and to detect it. An amount of 20 mg was inserted in the microstructure. In order to improve the adsorption characteristics, PS layers were manufactured in the microchannels using silicon nitride as mask. The sealing of the microstructure with anodic bonded glass showed to be feasible either if the surface present PS or silicon nitride. Samples of PS layers covered by a plasma polymerized film, produced using HMDS, were analyzed by Raman microscopy. It was noticed that the nanocrystals are completely fulfilled by the deposited material, indicating the high reactivity of the PS layer.

Citation Download Citation

Silvana Gasparotto de Souza, Elisabete Galeazzo, Maria Lucia Pereira da Silva, Rogerio Furlan, and Francisco Javier Ramirez Fernandez "Micromechanical structure development for chemical analysis: study of porous silicon as an adsorbent", Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); https://doi.org/10.1117/12.364467

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