Formation features of microdefect x-ray topography images in silicon crystals

Igor M. Fodchuk; M. D. Raransky; S. M. Novikov; P. E. Marmus; S. V. Bobrovnik

doi:10.1117/12.370439

18 November 1999 Formation features of microdefect x-ray topography images in silicon crystals

Igor M. Fodchuk, M. D. Raransky, S. M. Novikov, P. E. Marmus, S. V. Bobrovnik

Proceedings Volume 3904, Fourth International Conference on Correlation Optics; (1999) https://doi.org/10.1117/12.370439
Event: International Conference on Correlation Optics, 1999, Chernivsti, Ukraine

Abstract

On the basis of the numerical solution of Takagi's equation system the influence of ultrasonic wave parameters on enhancement and suppression of diffraction contrast of microdefects on section topographs is investigated. Homogeneous (n equals 6,2 (DOT) 10⁵ cm^-3) and random (n equals 2,5 (DOT) 10⁷ cm^-3) distribution of microdefects in volume are considered for thin ((mu) t equals 1) and intermediate ((mu) t approximately equals 3) thickness of Si crystal. Influence of strain fields from microdefects and homogeneous strains from ultra sound on integral parameters of crystal perfection is studied.

Citation Download Citation

Igor M. Fodchuk, M. D. Raransky, S. M. Novikov, P. E. Marmus, and S. V. Bobrovnik "Formation features of microdefect x-ray topography images in silicon crystals", Proc. SPIE 3904, Fourth International Conference on Correlation Optics, (18 November 1999); https://doi.org/10.1117/12.370439

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