50-mm MEMS deformable mirror

Sigmund Manhart; Werner J. Hupfer; Susanne Nikolov; Christian Wuehrer; Gleb V. Vdovin; Zoran Sodnik

doi:10.1117/12.390294

7 July 2000 50-mm MEMS deformable mirror

Sigmund Manhart, Werner J. Hupfer, Susanne Nikolov, Christian Wuehrer, Gleb V. Vdovin, Zoran Sodnik

Proceedings Volume 4007, Adaptive Optical Systems Technology; (2000) https://doi.org/10.1117/12.390294
Event: Astronomical Telescopes and Instrumentation, 2000, Munich, Germany

Abstract

A 50 mm diameter micromachined membrane mirror was designed and manufactured at TU Delft/DIMES in the framework of ESA's technology research program on adaptive optics. Equipped with 39 actuator electrodes the membrane mirror can be electrostatically deformed and used as a wavefront corrector. Functional and performance tests were carried out at Dornier Satellitensysteme GmbH to show its suitability for quasi- static correction of low-order aberrations caused by thermal and gravitational stresses in the future generation of large space telescopes.

Citation Download Citation

Sigmund Manhart, Werner J. Hupfer, Susanne Nikolov, Christian Wuehrer, Gleb V. Vdovin, and Zoran Sodnik "50-mm MEMS deformable mirror", Proc. SPIE 4007, Adaptive Optical Systems Technology, (7 July 2000); https://doi.org/10.1117/12.390294

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