CFD-Micromesh: a fast geometric modeling and mesh generation tool for 3D microsystem simulations

Zhiqiang Tan; M. Furmanczyk; Marek Turowski; Andrzej J. Przekwas

doi:10.1117/12.382289

10 April 2000 CFD-Micromesh: a fast geometric modeling and mesh generation tool for 3D microsystem simulations

Zhiqiang Tan, M. Furmanczyk, Marek Turowski, Andrzej J. Przekwas

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382289
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

In this work, a new fully automated geometrical modeling and meshing tool is described. It imports standard layout formats, images, and 3D boundary representations s. A 3D model is then generated by simulating 3D operations specified by the process data or the user. A 3D finite element mesh with tagged boundary and volume conditions is then automatically created. The automatic generation of 3D model and mesh takes typically a couple of minutes on a current PC machine. The paper will present the geometry/meshing engines, user interfaces, and will demonstrate them on a range of microsystem applications.

Citation Download Citation

Zhiqiang Tan, M. Furmanczyk, Marek Turowski, and Andrzej J. Przekwas "CFD-Micromesh: a fast geometric modeling and mesh generation tool for 3D microsystem simulations", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382289

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