High-contrast i-line positive photoresist for laser reticle writer

Yoshihito Kobayashi; Y. Oppata; Y. Ezoe; Fumiaki Shigemitsu; K. Urayama; K. Doi

doi:10.1117/12.392066

19 July 2000 High-contrast i-line positive photoresist for laser reticle writer

Yoshihito Kobayashi, Y. Oppata, Y. Ezoe, Fumiaki Shigemitsu, K. Urayama, K. Doi

Proceedings Volume 4066, Photomask and Next-Generation Lithography Mask Technology VII; (2000) https://doi.org/10.1117/12.392066
Event: Photomask and Next Generation Lithography Mask Technology VII, 2000, Kanagawa, Japan

Abstract

Lately laser writing tools have been dominated for producing leading-edge reticles. In addition, high resolution resist adjusted to the writing tool is strongly required to enhance the mask-making process capability. Here we have developed an i-line positive photoresist named 'THMR M100'. The most significant feature of the resists is higher contrast that can bring us high-resolution patterns as well as better CD accuracy. We realized 0.4 micron or less patterns were able to be formed with its high-contrast process in combination with ALTA tool. In fact the separate resolution was 0.3 micron. Furthermore, almost vertical side-wall angle of the developed resist was also achieved. We will deliver the excellent performance for fabricating the high-end reticles that this newly developed resist indicated.

Citation Download Citation

Yoshihito Kobayashi, Y. Oppata, Y. Ezoe, Fumiaki Shigemitsu, K. Urayama, and K. Doi "High-contrast i-line positive photoresist for laser reticle writer", Proc. SPIE 4066, Photomask and Next-Generation Lithography Mask Technology VII, (19 July 2000); https://doi.org/10.1117/12.392066

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available