Increasing the optical coupling efficiency of planar photodetectors: electron beam writing of an integrated microlens array on top of an MSM device

Antonio Carlos Seabra; F. G. Araes; Murilo Araujo Romero; Luiz Goncalves Neto; Bahram Nabet

doi:10.1117/12.386781

24 May 2000 Increasing the optical coupling efficiency of planar photodetectors: electron beam writing of an integrated microlens array on top of an MSM device

Antonio Carlos Seabra, F. G. Araes, Murilo Araujo Romero, Luiz Goncalves Neto, Bahram Nabet

Author Affiliations +

Proceedings Volume 4089, Optics in Computing 2000; (2000) https://doi.org/10.1117/12.386781
Event: 2000 International Topical Meeting on Optics in Computing (OC2000), 2000, Quebec City, Canada

Abstract

In this paper we describe the fabrication of an array of integrated cylindrical microlenses on top of a single GaAs MSM photodetector. Experimental data shows an increase of about 65% on the photocurrent of the MSM photodiode as a result of the improved optical coupling efficiency.

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Antonio Carlos Seabra, F. G. Araes, Murilo Araujo Romero, Luiz Goncalves Neto, and Bahram Nabet "Increasing the optical coupling efficiency of planar photodetectors: electron beam writing of an integrated microlens array on top of an MSM device", Proc. SPIE 4089, Optics in Computing 2000, (24 May 2000); https://doi.org/10.1117/12.386781

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