High-frequency rf microswitches using MEMS-integrated fabrication process

Ai Qun Liu; Geok Ing Ng; Yee Loy Lam; S. T. Chew; S. K. Ting

doi:10.1117/12.404912

20 October 2000 High-frequency rf microswitches using MEMS-integrated fabrication process

Ai Qun Liu, Geok Ing Ng, Yee Loy Lam, S. T. Chew, S. K. Ting

Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404912
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

Both electrical and mechanical models, exemplified with a micromachined capacitive switch with simple bridge structure, accurately describing its electrical and mechanical characteristics are described in this paper. The electrical model is represented as a RLC circuit, while the mechanical model is represented as a fixed-fixed beam. The advantage of these models is that it is possible to pre- determine various characteristics, such as the switching time of micromachinecd capacitive switches, during the design stage. These models can be used to accurately design micromachined capacitive switches for microwave applications. An illustrated fabrication process is also discussed.

Citation Download Citation

Ai Qun Liu, Geok Ing Ng, Yee Loy Lam, S. T. Chew, and S. K. Ting "High-frequency rf microswitches using MEMS-integrated fabrication process", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); https://doi.org/10.1117/12.404912

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