Analysis of diffraction images by a Ronchi grating of objects with a periodical structure

C. Santiago Tepantlan; Fermin S. Granados Agustin; Alejandro Cornejo-Rodriguez

doi:10.1117/12.437232

14 August 2001 Analysis of diffraction images by a Ronchi grating of objects with a periodical structure

C. Santiago Tepantlan, Fermin S. Granados Agustin, Alejandro Cornejo-Rodriguez

Author Affiliations +

Proceedings Volume 4419, 4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications; (2001) https://doi.org/10.1117/12.437232
Event: IV Iberoamerican Meeting of Optics and the VII Latin American Meeting of Optics, Lasers and Their Applications, 2001, Tandil, Argentina

Abstract

In this work, we present the results obtained in the laboratory when diffraction images are observed, produced by a Ronchi ruling, of a flat circular object, objects with a periodical structure, like for example screws, and masks, with certain regular structure. The diffraction images of these objects are processed by a computer program in order to determine important characteristic of them, for instance: the measurement of the diameter of a hole, the measurements of the profile of a screw, and the periodicity of the structure of square masks.

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C. Santiago Tepantlan, Fermin S. Granados Agustin, and Alejandro Cornejo-Rodriguez "Analysis of diffraction images by a Ronchi grating of objects with a periodical structure", Proc. SPIE 4419, 4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications, (14 August 2001); https://doi.org/10.1117/12.437232

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