Performance Of Multilayer Dispersion Elements From 80 To 500 eV

R J Bartlett; D R Kania; W J Trela; E Kallne; P Lee; E Spiller

doi:10.1117/12.939174

27 March 1984 Performance Of Multilayer Dispersion Elements From 80 To 500 eV

R J Bartlett, D R Kania, W J Trela, E Kallne, P Lee, E Spiller

Proceedings Volume 0447, Science with Soft X-Rays; (1984) https://doi.org/10.1117/12.939174
Event: 1983 Brookhaven Conference: Science with Soft X-Rays, 1983, Upton, United States

Abstract

We have measured the reflectivity of several multilayer dispersion elements between 80 and 500 eV. Two samples of ReW-C and one of Ni-C with 2d spacing of approximately 70 a and 150 A . were tested at angles of incidence between 10 to 80°. Measurements were made by fixing the incident and reflected angles (Bragg) and scanning the photon energy. Theoretical analyses of these multilayers have also been made and the results are compared with the experimental measurements.

Citation Download Citation

R J Bartlett, D R Kania, W J Trela, E Kallne, P Lee, and E Spiller "Performance Of Multilayer Dispersion Elements From 80 To 500 eV", Proc. SPIE 0447, Science with Soft X-Rays, (27 March 1984); https://doi.org/10.1117/12.939174

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