Silicon nitride biaxial pointing mirrors with stiffening ribs

Todd J. Kaiser; B. Jeffrey Lutzenberger; Robert A. Friholm; Phillip A. Himmer; David L. Dickensheets

doi:10.1117/12.443096

2 October 2001 Silicon nitride biaxial pointing mirrors with stiffening ribs

Todd J. Kaiser, B. Jeffrey Lutzenberger, Robert A. Friholm, Phillip A. Himmer, David L. Dickensheets

Author Affiliations +

Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443096
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

Gold-coated silicon nitride mirrors designed for two orthogonal rotations were fabricated. The devices were patterned out of nitride using surface micromachining techniques, and then released by a sacrificial oxide etch and bulk etching the silicon substrate. Vertical nitride ribs were used to stiffen the members and reduce the curvature of the mirrored surfaces due to internal stress in the nitride and the metal layer. This was accomplished by initially etching the silicon substrate to form a mold that was filled with nitride to create a stiffening lattice-work to support the mirrored section. Mirror diameters ranging from 100 mm to 500 mm have been fabricated, with electrostatic actuation used to achieve over four degrees of tilt for each axis.

Citation Download Citation

Todd J. Kaiser, B. Jeffrey Lutzenberger, Robert A. Friholm, Phillip A. Himmer, and David L. Dickensheets "Silicon nitride biaxial pointing mirrors with stiffening ribs", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443096

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