Fabrication of aperiodic gratings on silicon-on-insulator (SOI) rib waveguides using e-beam lithography

Venkat Raghavan Subramanian; Ray G. DeCorby; James N. McMullin; Chris J. Haugen; Miroslav Belov

doi:10.1117/12.463856

27 March 2002 Fabrication of aperiodic gratings on silicon-on-insulator (SOI) rib waveguides using e-beam lithography

Venkat Raghavan Subramanian, Ray G. DeCorby, James N. McMullin, Chris J. Haugen, Miroslav Belov

Author Affiliations +

Proceedings Volume 4654, Silicon-based and Hybrid Optoelectronics IV; (2002) https://doi.org/10.1117/12.463856
Event: Symposium on Integrated Optoelectronic Devices, 2002, San Jose, California, United States

Abstract

A technique for fabricating aperiodic Bragg gratings in rib waveguides on Silicon-On-Insulator (SOI) is presented. The technique allows flexibility in defining various characteristics of aperiodic gratings so that a full range of optical grating filters can be realized. The fabrication process comprises optical and electron-beam (e-beam) lithography followed by a liftoff and a single Reactive Ion Etch (RIE) to simultaneously produce the waveguide and the embedded grating structure.

Citation Download Citation

Venkat Raghavan Subramanian, Ray G. DeCorby, James N. McMullin, Chris J. Haugen, and Miroslav Belov "Fabrication of aperiodic gratings on silicon-on-insulator (SOI) rib waveguides using e-beam lithography", Proc. SPIE 4654, Silicon-based and Hybrid Optoelectronics IV, (27 March 2002); https://doi.org/10.1117/12.463856

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