Improvements of some non-conventional technologies for micro-optics at IMT-Bucharest

Niculae Dumbravescu

doi:10.1117/12.527055

19 November 2003 Improvements of some non-conventional technologies for micro-optics at IMT-Bucharest

Niculae Dumbravescu

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.527055
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

The "traditional" silicon planar technology, generating the field of micro-optics produces only a few shapes. To avoid that, many "non-conventional" technologies, based especially on photo-polymers, are investigating. This paper reports on some enhancements of such three technologies: LiGa, gray-tone lithography and embossing.

Citation Download Citation

Niculae Dumbravescu "Improvements of some non-conventional technologies for micro-optics at IMT-Bucharest", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.527055

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