Simplified time-averaged digital interferometry for vibration studies of microelements

Krzysztof Patorski; Agata Jozwicka; Artur Kalinowski; Michal Pawlowski

doi:10.1117/12.516582

27 May 2003 Simplified time-averaged digital interferometry for vibration studies of microelements

Krzysztof Patorski, Agata Jozwicka, Artur Kalinowski, Michal Pawlowski

Proceedings Volume 4933, Speckle Metrology 2003; (2003) https://doi.org/10.1117/12.516582
Event: Speckle Metrology 2003, 2003, Trondheim, Norway

Abstract

Among interferometric techniques for analyzing mechanical properties and behaviors of microelements and microsystems time-averaged interferometry deserves particular attention because of its relative simplicity and data video display for arbitrary vibration frequency. This communication presents an implementation of the approach of Petitgrand et al. to quantitative analysis of vibration mode shapes based on the calibration of the fringe contrast variation as a function of the vibration amplitude. Fringe contrast maps for static and resonant frequency states are determined using the four-frame method with the phase shift of π/2 between the frames. Then the dynamic map is divided by the static one to obtain the square of the modulus of the characteristic fringe function. For sinusoidal vibrations it is the zero-order Bessel function J₀ squared with the vibration amplitude encoded in its argument. The simplicity of our approach and speed of calculations are to be emphasized. The fringe processing method proposed is suitable for conventional two-beam and digital speckle interferometry. The results of experiments carried with silicone cantilever beams used in AFM resonant sensors are presented.

Citation Download Citation

Krzysztof Patorski, Agata Jozwicka, Artur Kalinowski, and Michal Pawlowski "Simplified time-averaged digital interferometry for vibration studies of microelements", Proc. SPIE 4933, Speckle Metrology 2003, (27 May 2003); https://doi.org/10.1117/12.516582

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