CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 4987 > Article
Paper
19 June 2003 Widely tunable micromachined filters using stress control of multilayer mirrors
Fumio Koyama, Takeru Amano
Author Affiliations +
Proceedings Volume 4987, Integrated Optics: Devices, Materials, and Technologies VII; (2003) https://doi.org/10.1117/12.478333
Event: Integrated Optoelectronics Devices, 2003, San Jose, CA, United States
Abstract
We proposed and demonstrated a micromachined filter with a strain control layer, which gives us novel functions including temperature insensitive operation, thermal wavelength tuning, wavelength trimming and 2-D multi-wavelength integration. In this paper, we present the design and the fabrication of micromachined thermally tunable filters with a low tuning voltage. In our micromachined micromachined filter, an air gap is formed between GaAlAs/GaAs DBRs with an upper DBR mirror freely suspended above the substrate by a cantilever structure. A novelty in our devices is to add a GaAs or GaAlAs thermal strain control layer on the upper DBR. We can freely control the temperature dependence of the proposed MEMS cavity. Either temperature insensitive operation or wide wavelength tuning induced by temperature change can be realized. Also, we fabricated a micromachined thermally tunable filter with a heating element. There are two electrodes integrated on the top p-type doped strain control layer of this filter for heating the cantilever. When a voltage is applied between the two electrodes resulting in heating, the micromachined cantilever moves due to thermal strain. The proposed structure enables thermal wavelength tuning either for red shift or blue shift. The amount of wavelength tuning is controlled by the length and the thermal capacity of the cantilever. We can expect much lower tuning voltage than conventional electrostatic force tuning scheme. We measured the tuning characteristics of fabricated filters with changing an applied voltage between two electrodes. We could obtain blue-shift wavelength tuning of over 50 nm with an applied voltage of 6 V.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Fumio Koyama and Takeru Amano "Widely tunable micromachined filters using stress control of multilayer mirrors", Proc. SPIE 4987, Integrated Optics: Devices, Materials, and Technologies VII, (19 June 2003); https://doi.org/10.1117/12.478333
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 8 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Wavelength tuning
Tunable filters
Electrodes
Gallium arsenide
Temperature metrology
Control systems
Microelectromechanical systems
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top