Copy result exactly using EB-SCOPE technology

Keizo Yamada; Takeo Ushiki; Yousuke Itagaki; Robert Newcomb

doi:10.1117/12.485028

2 June 2003 Copy result exactly using the EB-SCOPE technology

Keizo Yamada, Takeo Ushiki, Yousuke Itagaki, Robert Newcomb

Proceedings Volume 5038, Metrology, Inspection, and Process Control for Microlithography XVII; (2003) https://doi.org/10.1117/12.485028
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

This paper presents the concept of 'copy result exactly' frameworks using EB-SCOPE technology which must be a powerful tool for coping the best process condition producing ever lasting good contact and via hole.

Citation Download Citation

Keizo Yamada, Takeo Ushiki, Yousuke Itagaki, and Robert Newcomb "Copy result exactly using the EB-SCOPE technology", Proc. SPIE 5038, Metrology, Inspection, and Process Control for Microlithography XVII, (2 June 2003); https://doi.org/10.1117/12.485028

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