Some issues in mechanical design of MEMS transducers

Rudra Pratap

doi:10.1117/12.514771

14 October 2003 Some issues in mechanical design of MEMS transducers

Rudra Pratap

Proceedings Volume 5062, Smart Materials, Structures, and Systems; (2003) https://doi.org/10.1117/12.514771
Event: Smart Materials, Structures, and Systems, 2002, Bangalore, India

Abstract

The focus in MEMS technology is now slowly changing from process-centric research to design. More and more mechanical designers are entering MEMS field. However, most designers have intuitive feel for macro-scale designs, but not for micro-scale design. Intuition is an indispensable tool in design that cannot be replaced by brute force simulation. This paper is about some of the issues in mechanical design of MEMS transducer elements that are not yet a part of a designer's intuition. We discuss, through examples, why these issues belie our intuition at the micro-scale.

Citation Download Citation

Rudra Pratap "Some issues in mechanical design of MEMS transducers", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); https://doi.org/10.1117/12.514771

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