Comparison of laser induced front- and rear-side ablation

Stefan Beyer; Vivi Tornari; Daniel Gornicki

doi:10.1117/12.540498

18 November 2003 Comparison of laser induced front- and rear-side ablation

Stefan Beyer, Vivi Tornari, Daniel Gornicki

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540498
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

An overview on the rear side ablation process and its characteristic mechanisms is presented. Starting with a description of the commonly used front side ablation and definitions of the ablation efficiency, we give results from our investigations of the model system black paint on floatglass, processed with q-switched Nd:YAG laser, operating with pulse durations of 360 ns and 8 ns at a wavelength of 1064 nm. In addition we present results from various other samples and laser sources such as Excimer laser. The experiments confirm that the efficiency for the rear side ablation process is up to two magnitudes higher than that for front side ablation and that the process is more efficient for the shorter pulse duration. Some quality aspects are discussed, that have to be taken into account, when rear side ablating. We present a first general model to explain the surprisingly high difference in the ablation efficiency and the fact, that the rear side ablation efficiency increases with increasing layer thickness. We address the initial thermal ablation step being threshold-determining and the final photomechanical step being efficiency-determining. Finally, we give an outlook to next approaches.

Citation Download Citation

Stefan Beyer, Vivi Tornari, and Daniel Gornicki "Comparison of laser induced front- and rear-side ablation", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540498

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