Laser microfabrication of glass substrates by pocket scanning

B. Lan; Ming Hui Hong; Kaidong D. Ye; Z. B. Wang; Tow Chong Chong

doi:10.1117/12.540725

18 November 2003 Laser microfabrication of glass substrates by pocket scanning

B. Lan, Ming Hui Hong, Kaidong D. Ye, Z. B. Wang, Tow Chong Chong

Author Affiliations +

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540725
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

Precise laser microfabrication of glass is a high challenge task due to the stress-induced microcracks generated during laser ablation. In this paper, the results of high quality glass microfabrication by low energy Nd:YAG laser (355 nm, 30 ns) ablation and pocket scanning technique are presented. The pocket scanning is to scan the laser beam along parallel overlapped paths with the last path along the structure edge, while the conventional direct scanning is to scan the beam just along the structure edge. It is found that the cracks formed around the edges by pocket scanning are reduced significantly compared to that by direct scanning. Minimum crack sizes of less than 10 μm have been obtained at optimized parameters. The ablation depth is also enhanced greatly by pocket scanning to increase almost linearly with the laser fluence and scanning loop. There are no limitations of saturation as that observed in the cases of direct scanning.

Citation Download Citation

B. Lan, Ming Hui Hong, Kaidong D. Ye, Z. B. Wang, and Tow Chong Chong "Laser microfabrication of glass substrates by pocket scanning", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540725

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