Titanium-containing glass for laser micromachining

Masanori Shojiya; Hirotaka Koyo; Keiji Tsunetomo

doi:10.1117/12.540722

18 November 2003 Titanium-containing glass for laser micromachining

Masanori Shojiya, Hirotaka Koyo, Keiji Tsunetomo

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Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540722
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

It was found that titanium ions in glasses are effective to reduce the ablation threshold in the UV laser irradiation. The glasses containing titanium ions showed one order smaller thresholds compared with other commercial glasses used for optics or windows. The lowest threshold around 200 mJcm^-2 was obtained in 266-nm irradiation from a forth harmonics of Nd:YAG laser. The ablation threshold decreases with increasing the titanium concentration in the glass. On the other hand, the ablation rate shows the maximum value at the molar ratio of titanium oxide around 10 - 20 mol% in the glass composition. A 4 x 4 planer micro-hole array (PMH) consist of the titanium containing glasses was successfully fabricated with a KrF excimer laser (248 nm). Because of the good machinability effective to prevent cracking and chipping during the laser machining, the PMH showed good uniformity of hole diameter (average: 129.9 μm) with σ = 0.8 μm.

Citation Download Citation

Masanori Shojiya, Hirotaka Koyo, and Keiji Tsunetomo "Titanium-containing glass for laser micromachining", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540722

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