Paper
14 November 2003 Excimer laser processing of silicone rubber: from understanding the process to applications
Claudio Dicara, T. Robert, Konstantin Kolev, Catherine Dupas-Bruzek, Lucien Diego Laude
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Proceedings Volume 5147, ALT'02 International Conference on Advanced Laser Technologies; (2003) https://doi.org/10.1117/12.537694
Event: ALT'02 International Conference on Advanced laser Technologies, 2002, Adelboden, Switzerland
Abstract
We report for the first time on the excimer laser (λ=248 nm) irradiation of siloxane-based flexible silicone rubber. Samples are investigated before and after laser treatment using optical microscopy, profilometry, SEM and Raman spectroscopy. Photodecompsition of silicone results in volatile organic radicals, Si clusters and sub-stoichiometric silica foam that develop on a rather chaotic surface topography. This novel medium is further exploited inducing selective auto-catalyzed metalization of the once-irradiated sample surface.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Claudio Dicara, T. Robert, Konstantin Kolev, Catherine Dupas-Bruzek, and Lucien Diego Laude "Excimer laser processing of silicone rubber: from understanding the process to applications", Proc. SPIE 5147, ALT'02 International Conference on Advanced Laser Technologies, (14 November 2003); https://doi.org/10.1117/12.537694
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Cited by 8 scholarly publications.
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KEYWORDS
Silicon

Raman spectroscopy

Semiconductor lasers

Excimer lasers

Scanning electron microscopy

Micro raman spectroscopy

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