Laser annealing of ion-implanted diamond

Sergej M. Pimenov; Vitaliy V. Kononenko; Taras V. Kononenko; Vitali I. Konov; Pascal Fischer; Valerio Romano; Heinz P. Weber; A. V. Khomich; R. A. Khmelnitskiy

doi:10.1117/12.537498

14 November 2003 Laser annealing of ion-implanted diamond

Sergej M. Pimenov, Vitaliy V. Kononenko, Taras V. Kononenko, Vitali I. Konov, Pascal Fischer, Valerio Romano, Heinz P. Weber, A. V. Khomich, R. A. Khmelnitskiy

Author Affiliations +

Proceedings Volume 5147, ALT'02 International Conference on Advanced Laser Technologies; (2003) https://doi.org/10.1117/12.537498
Event: ALT'02 International Conference on Advanced laser Technologies, 2002, Adelboden, Switzerland

Abstract

Laser-induced structure transformations in diamond single crystals implanted with light ions (H⁺, D⁺, He⁺) are studied by monitoring changes in the material density and optical transmission in dependence on UV laser pulsed irradiation parameters and ion implantation conditions. Characteristic features of the processes of laser annealing, graphitization, low-rate etching and explosive ablation of ion-implanted diamond layers are discussed.

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Sergej M. Pimenov, Vitaliy V. Kononenko, Taras V. Kononenko, Vitali I. Konov, Pascal Fischer, Valerio Romano, Heinz P. Weber, A. V. Khomich, and R. A. Khmelnitskiy "Laser annealing of ion-implanted diamond", Proc. SPIE 5147, ALT'02 International Conference on Advanced Laser Technologies, (14 November 2003); https://doi.org/10.1117/12.537498

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